Ultra-smooth lithium niobate photonic micro-structures by surface tension reshaping
نویسندگان
چکیده
منابع مشابه
Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling
Lithium niobate LiNbO3, LN is an important material which is widely applied in fabricating photonic and acoustic devices. However, it is difficult to either wet etch or dry etch LN due to the material’s properties. Here, the authors report novel pattern fabrication based on LN using focused ion beam FIB milling. When an array of small holes is etched, a severe tapering problem is observed as is...
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We present the use of a liquid crystal spatial light modulator to correct for the refractive-index mismatch induced spherical aberration in a high refractive-index lithium niobate crystal when a low repetition rate amplified laser is used for the direct fabrication of three-dimensional micro-structures. By correcting the aberration based on experimentally determined values, we show that the siz...
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Recent progress of wet etching of Z-cut LN, of inductively coupled plasma (ICP-) etching of X-cut LN, and of ICP-etching of proton-exchanged X-cut LN is reported to fabricate low loss ridge guides, micromechanical, and photonic crystal structures. Introduction The development of lithium niobate (LiNbO3, LN) integrated optical devices requires etching techniques for a reliable fabrication of dee...
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Suspended waveguides have been widely applied to silicon-on-insulator structures because they are easily fabricated with processing techniques similar to those of integrated circuit design. However, it is difficult to fabricate such structures in lithium niobate, which is also a very important material for optoelectronics. One main challenge is the difficulty of etching lithium niobate. In this...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.011508